Abstract
Raman spectroscopy of amorphous hydrogenated carbon nitride (a-C: H: N) films deposited by PECVD respectively were studied. The three stage Ferrari Robertson model was used to explain the structural modifications taking place. A competition between the cluster size growth and clustering itself was identified. A graphene to graphane conversion leading to hydrogen storage possibility in the films has been discussed. Higher nitrogen concentration also led to smoothening of the films. The growth of nanocrystallites took place which was evident through XRD.