Abstract
The theory of ion source is of great significance to the design and development of ion source, the slow development of this restricts the design and development of ion source, which makes the ion source meet many bottlenecks from laboratory to commercialization. By introducing ion evaporation model (IEM), charged residue model (CRM), chain ejection theory, Zhu yixin's experiment and theory, ion migrate and transport, the paper summarizes the recent research progress in this field, and looks forward to the development of this kind research.