Controlled nano-foam-structured ultra-micro device enables rapid, sensitive detection for biological and chemical sensing



Advances in multiplexed sensing on a single chip device offer a range of advantages for the development of new biosensing platforms. The increasing number of reports on multiplexed sensing demonstrates the reliability and attractiveness of merging several closely packed sensing areas. However, the most important starting point for this emerging technology is being able to reproducibly manufacture chips with high yield. Microfabrication is arguably the most elegant approach to develop chips with ultra micro and nano scaled sensing electrodes that have the highest reproducibility and design flexibility. With this approach, it is possible to manufacture devices at very small scales with any arrangement of the components on a single chip. Such devices are not only outstanding for sensing applications but also for building interfaces for electrochemistry with very high reproducibility at the micro and nanoscale, so called micro/nanoarchitectures. Here we show one route for a successful fabrication protocol of ultra-micro scaled sensing electrode chips. We demonstrate the effectiveness of alkaline and acidic treatments in terms of cleaning and reproducibility of electrochemical sensing on chip and on wafer. The alkaline treatment protocol established for these particular microfabricated chips will aid the development of highly reproducible biosensors. Herein, we clearly demonstrate the intimate link between the microfabrication and engineering micro-interfaces for high performance sensing tools in the fields of chemical and biological applications.


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