Resistive Pulse Sensing with Micro-fabricated Nanopores (NP-RPS) for Sub-micron Biomolecule and Bionanoparticle Analysis

Biomolecules and bionanoparticles, such as nucleic acids, proteins, microorganisms and extracellular vesicles (EVs), are recognized as important targets for fundamental research, clinical diagnostic and therapeutic applications. To gain detailed information of those bionanoparticles, we demonstrate an electroosmotic (EO) driven transport behavior in silicon and silicon nitride-based nanopore, towards an accurate measure of concentration and sizing of sub-micro particles for a general biological interest.