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Abstract
The reaction pathways of Pt CVD using (COD)PtMe2-xClx (x = 0, 1, 2) have been investigated on functionalized self-assembled monolayers (SAMs) as models for organic substrates. In the presence of 1,4-cyclohexadiene, a well-known alkyl radical trap, Pt deposition was increased by up to 10-fold creating a room-temperature effective Pt CVD process.
This article has been submitted to the Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films.
This article has been submitted to the Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films.
