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The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert-Butylferrocene and O3

27 November 2019, Version 1
Working Paper
This content is a preprint and has not undergone peer review at the time of posting.

Abstract

This work demonstrates a mechanistic study of iron oxide deposited by ALD, revealing a growth mechanism involving uptake of superstoichiometric oxygen. Material characterization shows ozone exposure can be used to convert the crystallographic phase and domain orientation of the materials. This mechanism has implications for wider classes of ozone-based ALD processes and can generalize to other systems.

Keywords

Thin films
Atomic Layer Deposition
Iron Oxide
Ozone

Supplementary materials

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Description
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InfluenceOfOzone SI ChemRxiv
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Now Published

The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe 2 O 3 Using tert ‐Butylferrocene and O 3 [opens in a new tab]
Joel R. Schneider, Jon G. Baker, Stacey F. Bent journal article
Advanced Materials Interfaces , Volume 7, Issue 11
Online publication date: Apr 26, 2020

Version History

Nov 27, 2019 Version 1

Version Notes

Initial manuscript version with supplementary information

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The content is available under CC BY NC ND 4.0 [opens in a new tab]

DOI

10.26434/chemrxiv.10413779.v1
D O I: 10.26434/chemrxiv.10413779.v1 [opens in a new tab]

Funding

Basic Energy Sciences
DE-SC0004782
New Methods of Activating Atomic Layer Deposition for Materials Synthesis
https://app.dimensions.ai/details/grant/grant.4322122 [opens in a new tab]
Directorate for Education & Human Resources
1656518
Graduate Research Fellowship Program (GRFP)
https://app.dimensions.ai/details/grant/grant.5542465 [opens in a new tab]
Directorate for Engineering
1542152
NNCI: Stanford University - SNSF, SNF, MAF, EMF
https://app.dimensions.ai/details/grant/grant.4318468 [opens in a new tab]

Author’s competing interest statement

No conflict of interest.

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