The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert-Butylferrocene and O3

27 November 2019, Version 1
This content is a preprint and has not undergone peer review at the time of posting.


This work demonstrates a mechanistic study of iron oxide deposited by ALD, revealing a growth mechanism involving uptake of superstoichiometric oxygen. Material characterization shows ozone exposure can be used to convert the crystallographic phase and domain orientation of the materials. This mechanism has implications for wider classes of ozone-based ALD processes and can generalize to other systems.


Thin films
Atomic Layer Deposition
Iron Oxide

Supplementary materials

InfluenceOfOzone SI ChemRxiv


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