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The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert-Butylferrocene and O3

submitted on 20.11.2019, 01:20 and posted on 27.11.2019, 13:03 by Joel Schneider, Jon Baker, Stacey Bent
This work demonstrates a mechanistic study of iron oxide deposited by ALD, revealing a growth mechanism involving uptake of superstoichiometric oxygen. Material characterization shows ozone exposure can be used to convert the crystallographic phase and domain orientation of the materials. This mechanism has implications for wider classes of ozone-based ALD processes and can generalize to other systems.


New Methods of Activating Atomic Layer Deposition for Materials Synthesis

Basic Energy Sciences

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Graduate Research Fellowship Program (GRFP)

Directorate for Education & Human Resources

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NNCI: Stanford University - SNSF, SNF, MAF, EMF

Directorate for Engineering

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Email Address of Submitting Author


Stanford University


United States

ORCID For Submitting Author


Declaration of Conflict of Interest

No conflict of interest.

Version Notes

Initial manuscript version with supplementary information